l_stepx(ret)v2rev 52011-02-15IEC 62258
reticule step size x
0112/2///61360_4#AAD168
nominal length of the step-and-repeat dimensions of a reticule containing die on a wafer in the x direction
- Used by classes
- 1
Also appears in1#
Entities with the same name in other dictionaries:
- Code
AAD168- Data type
- LEVEL(NOM) OF REAL_MEASURE_TYPE
- Unit
- UAA726 UAA726
All properties24#
- Version
- 2
- Revision
- 5
- Preferred name
- reticule step size x
- Short name
- l_stepx(ret)
- Definition
- nominal length of the step-and-repeat dimensions of a reticule containing die on a wafer in the x direction
- Definition source
- IEC 62258
- Remark
- A reticule will normally contain more than one die which will have their own step-and-repeat dimensions within it
- Definition class
- 0112/2///61360_4#AAA302die device
- Unit structure
- m
- Drawing reference
- NR3..3.3ES2
- Initial value
- 0112/2///62720#UAA726 UAA726
- Responsible committee
- SC3D
- Publisher
- IEC
- Published in
- 3D/ggg
- Published in
- NON_DEPENDENT_P_DET
- Status level
- Standard
- Version release date
- 2015-08-17
- Revision release date
- 2011-02-15
- Version initiation date
- 2015-08-17
- Original definition date
- 2003-04-01
- MDC_P022
- LEVEL(NOM) OF REAL_MEASURE_TYPE
- MDC_P025_1
- l_stepx(ret)}
- MDC_P040
- T03