v1rev 22011-02-15
index in the form of a flat on the edge of the wafer
0112/2///61360_4#AUA05A
value term- Enumeration code
AUA05A
Metadata#
- Version
- 1
- Revision
- 2
- Status
- Standard
- Change request
C00030- Dates
- Current version: 2011-02-15
- Current revision: 2011-08-29