l_stepy(ret)v2rev 52011-02-15IEC 62258

reticule step size y

0112/2///61360_4#AAD169

nominal length of the step-and-repeat dimensions of a reticule containing die on a wafer in the y direction

Used by classes: 1

property

Also appears in1#

Entities with the same name in other dictionaries:

iec-61360-4AAD169Propertie

Code: AAD169
Data type: LEVEL(NOM) OF REAL_MEASURE_TYPE
Unit: UAA726 UAA726

Used by classes (1)

AAA302die device

Version history4#

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All properties24#

Version: 2
Revision: 5
Preferred name: reticule step size y
Short name: l_stepy(ret)
Definition: nominal length of the step-and-repeat dimensions of a reticule containing die on a wafer in the y direction
Definition source: IEC 62258
Remark: A reticule will normally contain more than one die which will have their own step-and-repeat dimensions within it
Definition class: 0112/2///61360_4#AAA302die device
Unit structure: m
Drawing reference: NR3..3.3ES2
Initial value: 0112/2///62720#UAA726 UAA726
Responsible committee: SC3D
Publisher: IEC
Published in: 3D/ggg
Published in: NON_DEPENDENT_P_DET
Status level: Standard
Version release date: 2015-08-17
Revision release date: 2011-02-15
Version initiation date: 2015-08-17
Original definition date: 2003-04-01
MDC_P001_6: 0112/2///61360_4#AAD169reticule step size y
MDC_P022: LEVEL(NOM) OF REAL_MEASURE_TYPE
MDC_P025_1: l_stepy(ret)}
MDC_P040: T03