t_wafer(tol)v2rev 62011-02-15IEC 62258
wafer thickness tolerance
0112/2///61360_4#AAD186
nominal tolerance on the thickness of a semiconductor wafer containing die devices
- Used by classes
- 1
- Code
AAD186- Data type
- LEVEL(NOM) OF REAL_MEASURE_TYPE
- Unit
- UAA726 UAA726
Version history5#
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Metadata#
- Source document
- IEC 62258
- Version
- 2
- Revision
- 6
- Status
- Standard
- Publisher
- IEC
- Published in
- IEC 61360-4
- Responsible committee
- IEC/TC 47
- Change request
C00162- Dates
- Original: 2007-02-14
- Current version: 2011-02-15
- Current revision: 2024-12-21