OpenCDDCommon Data Dictionary

v1rev 2

ASA017

0112/2///61360_4#ASA017

Terms: 2

value list

Terms2#

AUA05Aindex in the form of a flat on the edge of the wafer

AUA05Bindex in the form of a notch on the edge of the wafer

Metadata#

Version: 1
Revision: 2
Status: Standard
Change request: C00030
Dates: Current revision: 2011-08-29